The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferr...

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Main Authors: Arutt, Charles N (Author), Alles, Michael L (Author), Liao, Wenjun (Author), Gong, Huiqi (Author), Davidson, Jim L (Author), Schrimpf, Ronald D (Author), Reed, Robert A (Author), Weller, Robert A (Author), Bolotin, Kirill (Author), Nicholl, Ryan (Author), Pham, Thang Toan (Author), Zettl, Alex (Author), Li, Mo (Author), Alphenaar, Bruce W (Author), Lin, Ji-Tzuoh (Author), Shurva, Pranoy Deb (Author), McNamara, Shamus (Author), Walsh, Kevin M (Author), Feng, Philip X-L (Author), Hutin, Louis (Author), Ernst, Thomas (Author), Homeijer, Brian D (Author), Polcawich, Ronald G (Author), Proie, Robert M (Author), Jones, Jacob L (Author), Glaser, Evan R (Author), Cress, Cory D (Author), Bassiri-Gharb, Nazanin (Author), Du, Qingyang (Contributor), Hu, Juejun (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: IOP Publishing, 2017-12-08T14:52:06Z.
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