Dielectric Coating Thermal Stabilization During GaAs-Based Laser Fabrication for Improved Device Yield
The quality and yield of GaAs-based ridge waveguide devices fabricated at MIT Lincoln Laboratory were negatively impacted by the random lot-to-lot appearance of blisters in the front-side contact metal. The blisters signaled compromised adhesion between the front-side contact metal, underlying SiO2...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Springer US,
2016-12-16T20:43:08Z.
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| Subjects: | |
| Online Access: | Get fulltext |