Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems

Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems

We review recent progress of an effort led by the Stojanović (UC Berkeley), Ram (MIT) and Popović (CU Boulder) research groups to enable the design of photonic devices, and complete on-chip electro-optic systems and interfaces, directly in standard microelectronics CMOS processes in a microprocess...

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Bibliographic Details
Main Authors: Wade, Mark T. (Author), Orcutt, Jason Scott (Contributor), Shainline, Jeffrey M. (Author), Sun, Chen (Author), Georgas, Michael (Contributor), Moss, Benjamin Roy (Contributor), Kumar, Rajesh (Author), Alloatti, Luca (Contributor), Pavanello, Fabio (Author), Chen, Yu-Hsin (Contributor), Nammari, Kareem (Author), Notaros, Jelena (Author), Ram, Rajeev J. (Contributor), Popovic, Milos A. (Author), Atabaki, Amir H. (Contributor), Leu, Jonathan Chung (Contributor), Stojanovic, Vladimir (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: SPIE, 2016-01-27T18:19:30Z.
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