Monolithic silicon photonics in a sub-100nm SOI CMOS microprocessor foundry: progress from devices to systems

by Wade, Mark T., Orcutt, Jason Scott, Shainline, Jeffrey M., Sun, Chen, Georgas, Michael, Moss, Benjamin Roy, Kumar, Rajesh, Alloatti, Luca, Pavanello, Fabio, Chen, Yu-Hsin, Nammari, Kareem, Notaros, Jelena, Ram, Rajeev J., Popovic, Milos A., Atabaki, Amir H., Leu, Jonathan Chung, Stojanovic, Vladimir
Published 2016