Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD

A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic...

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Bibliographic Details
Main Author: Hasanudin, Muhammad Akmal (Author)
Format: Thesis
Published: 2015-03.
Subjects:
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