Simulasi suis optik menggunakan teknologi MEMs
MEMs or known as MicroElectromechanical System is first introduced in 1980s. This technology is a combination of sensors, mechanical and electronic elements. All of them are unite in single basic material (silicon) and fabricated using a micro-fabrication system. Two micro fabrication techniques are...
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| Format: | Thesis |
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2006-05.
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| Online Access: | Get fulltext |