Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface

Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface

Integration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acoustonanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nanostructures with acoustic piezoact...

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Main Authors: Kolesov Vladimir, Kuznetsova Iren, Kashin Vadim, Melnikov Alexander, Soldatov Eugenii, Dagesyan Sarkis
Format: Article
Language:English
Published: EDP Sciences 2019-01-01
Series:ITM Web of Conferences
Online Access:https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_08002.pdf
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spelling doaj-ffd12b2bae7a4856a2af0bb77e9cc89f2021-02-02T03:30:08ZengEDP SciencesITM Web of Conferences2271-20972019-01-01300800210.1051/itmconf/20193008002itmconf_crimico2019_08002Development of technology for producing nanowires on LiNbO3 piezoelectric plate surfaceKolesov Vladimir0Kuznetsova Iren1Kashin Vadim2Melnikov Alexander3Soldatov Eugenii4Dagesyan Sarkis5Kotel’nikov Institute of Radio Engineering and Electronics of RAS, Laboratory of Semiconductor Processes in Semiconductor MaterialsKotel’nikov Institute of Radio Engineering and Electronics of RAS, Laboratory of Semiconductor Processes in Semiconductor MaterialsKotel’nikov Institute of Radio Engineering and Electronics of RAS, Laboratory of Semiconductor Processes in Semiconductor MaterialsM.V. Lomonosov Moscow State University, Department of PhysicsM.V. Lomonosov Moscow State University, Department of PhysicsM.V. Lomonosov Moscow State University, Department of PhysicsIntegration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acoustonanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nanostructures with acoustic piezoactive waves propagating in piezoelectric substrates. In this work the technology of nanowire production on the surface of lithium niobate plate has been developed. This technology is based on using electronic lithography method with help an electronic beam in a raster electronic microscope. The nanostructure consisting of nanowire with size 20nm x 180nm was placed in the center between IDTs of acoustic delay line. The volt-ampere characteristics of this nanowire in presence and at the absence of the acoustic wave were meazured by picoampermeter. The analysis has shown that presence of piezoactive acoustic wave is influenced on electric current in a nanowire.https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_08002.pdf
collection DOAJ
language English
format Article
sources DOAJ
author Kolesov Vladimir
Kuznetsova Iren
Kashin Vadim
Melnikov Alexander
Soldatov Eugenii
Dagesyan Sarkis
spellingShingle Kolesov Vladimir
Kuznetsova Iren
Kashin Vadim
Melnikov Alexander
Soldatov Eugenii
Dagesyan Sarkis
Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
ITM Web of Conferences
author_facet Kolesov Vladimir
Kuznetsova Iren
Kashin Vadim
Melnikov Alexander
Soldatov Eugenii
Dagesyan Sarkis
author_sort Kolesov Vladimir
title Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
title_short Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
title_full Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
title_fullStr Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
title_full_unstemmed Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
title_sort development of technology for producing nanowires on linbo3 piezoelectric plate surface
publisher EDP Sciences
series ITM Web of Conferences
issn 2271-2097
publishDate 2019-01-01
description Integration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acoustonanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nanostructures with acoustic piezoactive waves propagating in piezoelectric substrates. In this work the technology of nanowire production on the surface of lithium niobate plate has been developed. This technology is based on using electronic lithography method with help an electronic beam in a raster electronic microscope. The nanostructure consisting of nanowire with size 20nm x 180nm was placed in the center between IDTs of acoustic delay line. The volt-ampere characteristics of this nanowire in presence and at the absence of the acoustic wave were meazured by picoampermeter. The analysis has shown that presence of piezoactive acoustic wave is influenced on electric current in a nanowire.
url https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_08002.pdf
work_keys_str_mv AT kolesovvladimir developmentoftechnologyforproducingnanowiresonlinbo3piezoelectricplatesurface
AT kuznetsovairen developmentoftechnologyforproducingnanowiresonlinbo3piezoelectricplatesurface
AT kashinvadim developmentoftechnologyforproducingnanowiresonlinbo3piezoelectricplatesurface
AT melnikovalexander developmentoftechnologyforproducingnanowiresonlinbo3piezoelectricplatesurface
AT soldatoveugenii developmentoftechnologyforproducingnanowiresonlinbo3piezoelectricplatesurface
AT dagesyansarkis developmentoftechnologyforproducingnanowiresonlinbo3piezoelectricplatesurface
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