Development of technology for producing nanowires on LiNbO3 piezoelectric plate surface
Integration of nanostructures with acoustic delay lines within planar technologies give the chance of development the acoustonanoelectronic sensors with high sensitivity and selectivity. An initial step in this direction is investigation of interaction of tunnel nanostructures with acoustic piezoact...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | ITM Web of Conferences |
| Online Access: | https://www.itm-conferences.org/articles/itmconf/pdf/2019/07/itmconf_crimico2019_08002.pdf |