MEMS-based Low-g Inertial Switch

In this paper, a novel MEMS-based switch is designed and characterized for the purpose of sensing the low g acceleration and output on-off signa1. The switch consists of an annular proof-mass suspended by helix spring that is fixed to the pedestal which located in center and connected with the botto...

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Bibliographic Details
Main Authors: Shuangjie Liu, Yongping Hao, Suocheng Wang, Dashun Li
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2014-08-01
Series:Sensors & Transducers
Subjects:
Online Access:http://www.sensorsportal.com/HTML/DIGEST/august_2014/Vol_176/P_2262.pdf