MEMS-based Low-g Inertial Switch
In this paper, a novel MEMS-based switch is designed and characterized for the purpose of sensing the low g acceleration and output on-off signa1. The switch consists of an annular proof-mass suspended by helix spring that is fixed to the pedestal which located in center and connected with the botto...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2014-08-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/august_2014/Vol_176/P_2262.pdf |