MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION

MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION

A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action o...

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Bibliographic Details
Main Authors:	Dmitriy Tsyrenov, Aleksandr Semenov, Natalia Smirnyagina
Format:	Article
Language:	English
Published:	CTU Central Library 2015-04-01
Series:	Acta Polytechnica
Online Access:	https://ojs.cvut.cz/ojs/index.php/ap/article/view/2227

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