MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action o...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
CTU Central Library
2015-04-01
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| Series: | Acta Polytechnica |
| Online Access: | https://ojs.cvut.cz/ojs/index.php/ap/article/view/2227 |