MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION

MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION

A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action o...

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Main Authors: Dmitriy Tsyrenov, Aleksandr Semenov, Natalia Smirnyagina
Format: Article
Language:English
Published: CTU Central Library 2015-04-01
Series:Acta Polytechnica
Online Access:https://ojs.cvut.cz/ojs/index.php/ap/article/view/2227
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spelling doaj-feaaa3f7a2184eefb66a2150a26f16812020-11-24T23:46:13ZengCTU Central LibraryActa Polytechnica1210-27091805-23632015-04-0155213613910.14311/AP.2015.55.01362703MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATIONDmitriy Tsyrenov0Aleksandr Semenov1Natalia Smirnyagina2Institute of Physical Materials Science SB RASInstitute of Physical Materials Science SB RAS, Laboratory of Physical Materials Science, Sakhyanovoy St. 6,670047 Ulan-Ude, Russia.Institute of Physical Materials Science SB RAS, Laboratory of Physical Materials Science, Sakhyanovoy St. 6,670047 Ulan-Ude, Russia.A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action of the vacuum arc evaporator and the planar magnetron have been studied. This report describes the phase composition of TiN-Cu layers and the structure on fused silica substrates.https://ojs.cvut.cz/ojs/index.php/ap/article/view/2227
collection DOAJ
language English
format Article
sources DOAJ
author Dmitriy Tsyrenov
Aleksandr Semenov
Natalia Smirnyagina
spellingShingle Dmitriy Tsyrenov
Aleksandr Semenov
Natalia Smirnyagina
MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
Acta Polytechnica
author_facet Dmitriy Tsyrenov
Aleksandr Semenov
Natalia Smirnyagina
author_sort Dmitriy Tsyrenov
title MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
title_short MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
title_full MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
title_fullStr MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
title_full_unstemmed MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION
title_sort modernization features of a vacuum installation based on low-pressure arc discharge for composite tin-cu layers formation
publisher CTU Central Library
series Acta Polytechnica
issn 1210-2709
1805-2363
publishDate 2015-04-01
description A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action of the vacuum arc evaporator and the planar magnetron have been studied. This report describes the phase composition of TiN-Cu layers and the structure on fused silica substrates.
url https://ojs.cvut.cz/ojs/index.php/ap/article/view/2227
work_keys_str_mv AT dmitriytsyrenov modernizationfeaturesofavacuuminstallationbasedonlowpressurearcdischargeforcompositetinculayersformation
AT aleksandrsemenov modernizationfeaturesofavacuuminstallationbasedonlowpressurearcdischargeforcompositetinculayersformation
AT nataliasmirnyagina modernizationfeaturesofavacuuminstallationbasedonlowpressurearcdischargeforcompositetinculayersformation
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