Magnetic anisotropies in oblique columnar growth of FeCoB films

Magnetic anisotropies in oblique columnar growth of FeCoB films

We report on the evolution of anisotropies of FeCoB thin films deposited by magnetron sputtering with different oblique angles increasing from α = 0° to α = 75°. The oblique incidence deposition using the Fe43Co43B14 target leads, under chosen conditions, to columnar growth without bundling. This co...

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Bibliographic Details
Main Authors:	A. M. Aldimassi, A. Chevalier, J. Ben Youssef, V. Laur, B. Rouvellou
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2020-06-01
Series:	AIP Advances
Online Access:	http://dx.doi.org/10.1063/5.0003895

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