Magnetic anisotropies in oblique columnar growth of FeCoB films
We report on the evolution of anisotropies of FeCoB thin films deposited by magnetron sputtering with different oblique angles increasing from α = 0° to α = 75°. The oblique incidence deposition using the Fe43Co43B14 target leads, under chosen conditions, to columnar growth without bundling. This co...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0003895 |