Influence of Substrate Temperature on Structural, Electrical and Optical Properties of ZnO:Al Thin Films
Transparent and conductive aluminium-doped zinc oxide thin films have been prepared by dc magnetron sputtering technique using targets composed of ZnO and aluminium. Polycrystalline ZnO:Al films were deposited onto a heated glass substrate. Surface morphology and crystalline structure as well as opt...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Center for Development of Nuclear Informatics, National Nuclear Energy Agency (BATAN)
2009-07-01
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| Series: | Atom Indonesia |
| Subjects: | |
| Online Access: | http://aij.batan.go.id/index.php/aij/article/view/50 |