White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation
Based on generalized cross-correlation time delay estimation (GCTDE), a new white light scanning interferometry (WLSI) method is proposed, in which the profile information usually achieved with the zero optical path difference (ZOPD) position is replaced with the relative displacement of interferenc...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8003458/ |