Architecture and Process Integration Overview of 3D NAND Flash Technologies

In the past few decades, NAND flash memory has been one of the most successful nonvolatile storage technologies, and it is commonly used in electronic devices because of its high scalability and reliable switching properties. To overcome the scaling limit of planar NAND flash arrays, various three-d...

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Bibliographic Details
Main Authors: Geun Ho Lee, Sungmin Hwang, Junsu Yu, Hyungjin Kim
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/11/15/6703