Research of formation of photoluminescencing porous silicon with characterization its porosity.

In the article necessity of use of the specified parameter of porosity for characterization of PL layers of the porous silicon having more complex structure in comparison with usual porous mediums is shown. The provided parameter of porosity is used for comparison of properties of the porous silicon...

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Bibliographic Details
Main Authors: A. M. Hort, E. A. Shelonin, D. S. Nikulin, A. G. Yakovenko
Format: Article
Language:Russian
Published: MIREA - Russian Technological University 2007-10-01
Series:Тонкие химические технологии
Online Access:https://www.finechem-mirea.ru/jour/article/view/1346