Crystallization processes of Sb100−xZnx (0 ≤ x ≤ 70) amorphous films for use as phase change memory materials
The phase change processes of as-deposited Sb-Zn films were investigated. The as-deposited amorphous SbZn film showed an unusual increase in resistance during heating, which was attributed to crystallization of the metastable SbZn phase. Further heating up to more than 300oC resulted in a structural...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2015-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4931392 |