Titanium Hydride Formation in Current-Biased Titanium Microbolometer and Nanobolometer Devices
This paper presents a study on the impact of current-bias heating on the material properties and electrical characteristics of titanium (Ti) microbolometer and nanobolometer devices. We present TEM, electron microdiffraction, SIMS and SEM data showing the interaction effects of hydrogen present with...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_415.pdf |