Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings

Ta–B–C coatings were non-reactively sputter-deposited in an industrial batch coater from a single segmented rotating cylindrical cathode employing a combinatorial approach. The chemical composition, morphology, microstructure, mechanical properties, and fracture resistance of the coatings were inves...

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Bibliographic Details
Main Authors: Michael Kroker, Pavel Souček, Pavol Matej, Lukáš Zábranský, Zsolt Czigány, Katalin Balázsi, Petr Vašina
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Coatings
Subjects:
magnetron sputtering
industrial process
segmented target
TaBC
phase composition
structure
Online Access:https://www.mdpi.com/2079-6412/10/9/853

Internet

https://www.mdpi.com/2079-6412/10/9/853

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