TECHNOLOGIES FOR HETEROSTRUCTURES FORMATION OF TRANSDUCER

Background. The relevance of the work is due to the high heterogeneity of the elements and structures of modern microelectronic converters of physical quantities, designed to operate in a wide range of temperatures and radiation. The goal of the research is development of technologies for the for...

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Bibliographic Details
Main Authors: P. G. Mikhaylov, V. V. Smogunov, M. I. Vol'nikov
Format: Article
Language:English
Published: Penza State University Publishing House 2020-10-01
Series:Известия высших учебных заведений. Поволжский регион:Технические науки
Subjects: