Demonstration of biaxially tensile-strained Ge/SiGe multiple quantum well (MQW) electroabsorption modulators with low polarization dependence
We demonstrate a novel biaxially tensile-strained Ge/SiGe multiple quantum well (MQW) electroabsorption modulator with low polarization dependence. The device is waveguide integrated and has a length of 900 μm. Suspended microbridge structure is utilized to introduce biaxial tensile strain to the Ge...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2020-08-01
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| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2020-0321 |