Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry
Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essent...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/7/2486 |