Electrostatic Circular Membrane MEMS: An Approach to the Optimal Control
The recovery of the membrane profile of an electrostatic micro-electro-mechanical system (MEMS) is an important issue, because, when an external electrical voltage is applied, the membrane deforms with the risk of touching the upper plate of the device producing an unwanted electrostatic effect. The...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
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| Series: | Computation |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-3197/9/4/41 |