Advanced Diffusion Strategies for Junction Formation in Germanium

The investigation of innovative dynamical processes for the fabrication of highly doped and<br />high quality Ge layers is currently a hot topic in many applicative fields such as nanoelectronics,<br />photonics and radiation detectors. [...]

Bibliographic Details
Main Authors: Davide De Salvador, Francesco Sgarbossa, Gianluigi Maggioni, Enrico Napolitani, Chiara Carraro, Sara Maria Carturan, Walter Raniero, Stefano Bertoldo, Ruggero Milazzo, Virginia Boldrini, Gian Andrea Rizzi, Daniel Ricardo Napoli, Alberto Carnera
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Proceedings
Subjects:
n/a
Online Access:https://www.mdpi.com/2504-3900/26/1/39