Analysis for an Improved Nanomechanical Microcantilever Sensor on Optical Waveguides
An analysis model for an optical waveguide microcantilever sensor is developed combining the optical and mechanical models. An improved optical waveguide microcantilever sensor with a buffer is provided and taken as an example to explore using the analysis model. A systematic and detailed discussion...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2020-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9050462/ |