Nonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer
A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium. In practical work, the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors. Adding...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2589554019300224 |