Application of Anisotropic Thin Plate Theory for Development of Displacements for Silicon <111> Crystals Plates in Cylindrical Systems
Silicon <111> crystal is one of the crystal orientations, which shows potential for application in micro device developments of pressure diaphragms for measurement purposes. To date, no theoretical basis has been examined to develop the deflections for computational analysis purposes [1]. This...
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Format: | Article |
Language: | English |
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Sciendo
2016-12-01
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Series: | International Journal of Applied Mechanics and Engineering |
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Online Access: | https://doi.org/10.1515/ijame-2016-0052 |