Characterization and Optimization Design of the Polymer-based Capacitive Micro-arrayed Ultrasonic Transducer
The polymer-based capacitive micro-arrayed ultrasonic transducers have been investigated using the finite element analysis. The ANSYS Multiphysics solver with sequential approach and the physics environment files are applied for the solution of the electrostatic-structural coupled-field problem. A 2...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-10-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/october_07/P_SI_12.pdf |