Hybrid Top-Down/Bottom-Up Fabrication of a Highly Uniform and Organized Faceted AlN Nanorod Scaffold

Hybrid Top-Down/Bottom-Up Fabrication of a Highly Uniform and Organized Faceted AlN Nanorod Scaffold

As a route to the formation of regular arrays of AlN nanorods, in contrast to other III-V materials, the use of selective area growth via metal organic vapor phase epitaxy (MOVPE) has so far not been successful. Therefore, in this work we report the fabrication of a highly uniform and ordered AlN na...

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Bibliographic Details
Main Authors: Pierre-Marie Coulon, Gunnar Kusch, Philip Fletcher, Pierre Chausse, Robert W. Martin, Philip A. Shields
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Materials
Subjects:
AlN
nanorod
displacement Talbot lithography
etching
MOVPE
TEM
cathodoluminescence
Online Access:http://www.mdpi.com/1996-1944/11/7/1140

Internet

http://www.mdpi.com/1996-1944/11/7/1140

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