Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate

Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate

A thickness distribution model of photoresist spin-coating on concave spherical substrate (CSS) has been developed via both theoretical studies and experimental verification. The stress of photoresist on rotating CSS is analyzed and the boundary conditions of hydrodynamic equation are presented unde...

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Bibliographic Details
Main Authors: S. Yang, Bayanheshig, X. L. Zhao, S. Xing, Y. X. Jiang, N. Wu, Q. B. Jiao, W. H. Li, X. Tan
Format: Article
Language:English
Published: AIP Publishing LLC 2015-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4926343

Internet

http://dx.doi.org/10.1063/1.4926343

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