Epitaxial ferroelectric oxides on silicon with perspectives for future device applications
Functional oxides on silicon have been the subject of in-depth research for more than 20 years. Much of this research has been focused on the quality of the integration of materials due to their intrinsic thermodynamic incompatibility, which has hindered the flourishing of the field of research. Nev...
Main Authors: | , , , , , , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2021-04-01
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Series: | APL Materials |
Online Access: | http://dx.doi.org/10.1063/5.0039161 |