Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams
Nanoelectromechanical devices, which can be used as nanotools in nanofactories, were fabricated by focused ion beam chemical vapor deposition (FIB-CVD). The devices are made of diamond-like carbon (DLC), deposited on a Si substrate using gasified phenanthrene (C14H10) as a carbon source. The Young m...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2009-01-01
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| Series: | Science and Technology of Advanced Materials |
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| Online Access: | http://www.iop.org/EJ/abstract/1468-6996/10/3/034501 |