Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams

Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams

Nanoelectromechanical devices, which can be used as nanotools in nanofactories, were fabricated by focused ion beam chemical vapor deposition (FIB-CVD). The devices are made of diamond-like carbon (DLC), deposited on a Si substrate using gasified phenanthrene (C14H10) as a carbon source. The Young m...

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Bibliographic Details
Main Author: Reo Kometani and Sunao Ishihara
Format: Article
Language:English
Published: Taylor & Francis Group 2009-01-01
Series:Science and Technology of Advanced Materials
Subjects:
nanoelectromechanical device
nanotool
focused ion beam (FIB)
diamond-like carbon (DLC)
manipulator
work function
emitter
Rutherford backscattering spectroscopy-elastic recoil detection analysis (RBS/ERDA)
electron energy loss spectroscopy (EELS)
Young's modulus
density
Online Access:http://www.iop.org/EJ/abstract/1468-6996/10/3/034501

Internet

http://www.iop.org/EJ/abstract/1468-6996/10/3/034501

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