A Prototype Fabrication of Sensitive Porous Silicon NOx (x=1,2) Gas Sensor
A prototype of (porous silicon (PS) based) NO(x=1.2) gas sensor based on porous silicon (PS) (operated at room temperature) has been fabricated. The sensor could be operated at room temperature. The (PS) basic material for the material sensor ( i.e. PS) was fabricated in the previous research by var...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Fakultas MIPA Universitas Jember
2010-01-01
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| Series: | Jurnal Ilmu Dasar |
| Subjects: | |
| Online Access: | https://jurnal.unej.ac.id/index.php/JID/article/view/120 |