Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks

Optically black anti-reflective coatings that absorb light are potentially useful for color isolation in the flat panel display industries and stray light reduction in imaging technologies. Here we report the design and fabrication of high performance multilayered black anti-reflective coatings. Thi...

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Bibliographic Details
Main Authors: Adam E. Shimabukuro, Akihiro Ishii, Hitoshi Takamura, Fumio S. Ohuchi
Format: Article
Language:English
Published: Elsevier 2019-12-01
Series:Results in Physics
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379719317851