Definition of CVD Graphene Micro Ribbons with Lithography and Oxygen Plasma Ashing
This work presents the definition of CVD (Chemical Vapor Deposition) Graphene Micro Ribbons (GMRs) with traditional Photolithography and Oxygen Plasma Ashing, where: (i) CVD Graphene Micro Ribbons were defined in parallel and serpentine patterns; (ii) The defined width dimensions of GMRs are between...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-07-01
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| Series: | Carbon Trends |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S266705692100033X |