Definition of CVD Graphene Micro Ribbons with Lithography and Oxygen Plasma Ashing

Definition of CVD Graphene Micro Ribbons with Lithography and Oxygen Plasma Ashing

This work presents the definition of CVD (Chemical Vapor Deposition) Graphene Micro Ribbons (GMRs) with traditional Photolithography and Oxygen Plasma Ashing, where: (i) CVD Graphene Micro Ribbons were defined in parallel and serpentine patterns; (ii) The defined width dimensions of GMRs are between...

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Bibliographic Details
Main Authors: Fernando C. Rufino, Aline M. Pascon, Luana C.J. Espindola, Frederico H. Cioldin, Dunieskys R.G. Larrudé, José A. Diniz
Format: Article
Language:English
Published: Elsevier 2021-07-01
Series:Carbon Trends
Subjects:
Graphene
Photolithography
Oxygen Plasma Ashing
GFET technology
Online Access:http://www.sciencedirect.com/science/article/pii/S266705692100033X

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http://www.sciencedirect.com/science/article/pii/S266705692100033X

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