Fabrication and characterization of micro-inductors deposited on magnetic thin and thick layers
This paper presents two fabrication techniques of spiral integrated inductors based on magnetic materials. For the first one, the magnetic core is a thin film deposited by RF magnetron sputtering, for the second technique the magnetic core is a thick layer of YIG obtained by micromachining. The add...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Advanced Electromagnetics
2014-02-01
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| Series: | Advanced Electromagnetics |
| Subjects: | |
| Online Access: | https://aemjournal.org/index.php/AEM/article/view/210 |