Modelling and Diagnostics of Damages and Strains in a Crystal of Gd3Ga5O12 After Implantation of F+ Ions
Mathematical modelling of fluorine ion implantation process is carried out by using the SRIM-2008 program for the determination of quantitative characteristics of the radiation defect formation in the gadolinium–gallium garnet (GGG). The crystal depth distributions are measured for elastic and inela...
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| Format: | Article |
| Language: | English |
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G. V. Kurdyumov Institute for Metal Physics of the N.A.S. of Ukraine
2014-09-01
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| Series: | Успехи физики металлов |
| Online Access: | https://doi.org/10.15407/ufm.15.03.121 |