Luminescence from Si-Implanted SiO<sub>2</sub>-Si<sub>3</sub>N<sub>4</sub> Nano Bi-Layers for Electrophotonic Integrated Si Light Sources

Luminescence from Si-Implanted SiO<sub>2</sub>-Si<sub>3</sub>N<sub>4</sub> Nano Bi-Layers for Electrophotonic Integrated Si Light Sources

In this paper, we present structural and luminescence studies of silicon-rich silicon oxide (SRO) and SRO-Si<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>3</mn> </msub> </semantics> </math> &l...

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Bibliographic Details
Main Authors: Alfredo A. González-Fernández, Joan Juvert, Mariano Aceves-Mijares, Carlos Domínguez
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Sensors
Subjects:
integrated photonics
electrophotonics
SRO
oxynitride
photoluminescence
XPS
Online Access:https://www.mdpi.com/1424-8220/19/4/865

Internet

https://www.mdpi.com/1424-8220/19/4/865

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