A Novel Gyroscopic Actuation Concept for 2D MEMS Micromirrors
In this paper we present a novel approach to achieve indirect quasistatic deflection of 2D MEMS scanning micromirrors by solely resonant excitation utilizing gyroscopic effects. Therefore the micromirror is set to oscillate in its mirror plane additionally to its primary resonant oscillation with a...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/546 |