Characterizations of microwave plasma CVD grown polycrystalline diamond coatings for advanced technological applications
Polycrystalline diamond (PCD) coatings ranging from few microns to several hundred microns thickness have been grown by 915 MHz microwave plasma reactor with 9000 W power. The coatings were deposited on 100 mm diameter silicon (Si) substrate from few hours to several days of continuous runs. PCD coa...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
University of Novi Sad
2014-06-01
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Series: | Processing and Application of Ceramics |
Subjects: | |
Online Access: | http://www.tf.uns.ac.rs/publikacije/PAC/pdf/PAC%2024%2003.pdf |