NANOINDENTATION TEST FOR DLC COATING ANALYSIS
In this report the effects of the substrate on the microhardness of Diamond like carbon (DLC) thin films were investigated. The DLC coatings were deposited by Radio Frequency Plasma Actived Chemical Vapor Deposition (RF PACVD; 13,56 MHz) process on three mechanically polished substrates, which were...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Univerzity of Zilina. Faculty of Mechanical Engineering
2011-09-01
|
| Series: | Materiálové Inžinierstvo |
| Subjects: | |
| Online Access: | http://fstroj.uniza.sk/journal-mi/PDF/2011/18-2011.pdf |
| Summary: | In this report the effects of the substrate on the microhardness of Diamond like carbon (DLC) thin films were investigated. The DLC coatings were deposited by Radio Frequency Plasma Actived Chemical Vapor Deposition (RF PACVD; 13,56 MHz) process on three mechanically polished substrates, which were chosen for comparison; hardened molybdenum high speed steel AISI M2, unhardened tool steel AISI L2 and titanium alloy TiAl6V4. The aim of the present investigation was to determine the influence of substrates on microhardness and other mechanical properties of DLC layer. These properties especially microhardness were studied and compared from nanoindentation load – displacement curves. Results show that the hardness of the substrate is the crucial value for the hardness of the DLC films. |
|---|---|
| ISSN: | 1335-0803 1338-6174 |