NANOINDENTATION TEST FOR DLC COATING ANALYSIS
In this report the effects of the substrate on the microhardness of Diamond like carbon (DLC) thin films were investigated. The DLC coatings were deposited by Radio Frequency Plasma Actived Chemical Vapor Deposition (RF PACVD; 13,56 MHz) process on three mechanically polished substrates, which were...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Univerzity of Zilina. Faculty of Mechanical Engineering
2011-09-01
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| Series: | Materiálové Inžinierstvo |
| Subjects: | |
| Online Access: | http://fstroj.uniza.sk/journal-mi/PDF/2011/18-2011.pdf |