Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station

Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station

In order to build a motion system with high resolution, fast response, and long travel range in a probe station, a linear ultrasonic motor was investigated as an alternative to the electromagnetic counterpart in a servo system. This work focused on a longitudinal composite-mode linear ultrasonic mot...

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Bibliographic Details
Main Authors: Yin Wang, Ziyan Chen, Yunlai Shi, Changcai Cui, Fang Cheng
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Actuators
Subjects:
probe station
linear ultrasonic motor (LUSM)
longitudinal mode
FE simulation
Online Access:https://www.mdpi.com/2076-0825/9/4/111

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