Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station
In order to build a motion system with high resolution, fast response, and long travel range in a probe station, a linear ultrasonic motor was investigated as an alternative to the electromagnetic counterpart in a servo system. This work focused on a longitudinal composite-mode linear ultrasonic mot...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-11-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/9/4/111 |