Intensity-based laser distance measurement system using 2D electromagnetic scanning micromirror
Abstract In this research, we present the feasibility testing results of a simple distance measurement system using microfabricated scanning micromirrors. Two different configurations have been tested with different types of micromirrors. In the first configuration, Lissajous scan pattern has been g...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2018-11-01
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| Series: | Micro and Nano Systems Letters |
| Online Access: | http://link.springer.com/article/10.1186/s40486-018-0073-2 |