A Split Island Layout Style of Butting/Inserted Substrate Pickups for NMOSFET ESD Reliability

Butting/inserted pickup layout style could result in severe ESD degradation of NMOS devices beyond deep submicron technology. A split island layout style of butting/inserted substrate pickups is designed for a multifinger NMOS structure to enhance its ESD reliability. This layout style divides the s...

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Bibliographic Details
Main Authors: Chih-Yao Huang, Fu-Chien Chiu, Bo-Chen Lin, Po-Kung Song
Format: Article
Language:English
Published: Hindawi Limited 2015-01-01
Series:Advances in Materials Science and Engineering
Online Access:http://dx.doi.org/10.1155/2015/691403